Small Evaporation System FOR R&DThis is an evaporation system for the deposition of metal films and oxide films by using an EB gun and resistance heating evaporation sources.
SEV2000Plus
This is a system for the deposition of metal films and oxide films on substrates. The vacuum exhaust can be automatically activated by
touch screen and this is the suitable system for R&D which can control
the film thickness by using Quartz Crystal Microbalance (QCM).
POINT
- Space saving system
- Easy setting of the substrate tray by a front hatch and automated chucking mechanism.
- Expandable with Sputter, ALD and Anneal systems of Plus series.
Outer dimension (Main unit)
W2450mm×D1050mm×H1840mm
| Vapor deposition sources | Vapor deposition sources | Operation | Combination |
|---|---|---|---|
| Electron gun | Resistance heating | Touch Screen Electron Manual | ✓ |
Outline and Application
This is an evaporation system for the deposition of metal films and oxide films by using an EB gun and resistance heating evaporation sources.
The vacuum exhaust can be automatically activated by a touch screen and this is the suitable system for R&D which can control the film thickness by using a coating thickness gauge with quartz crystals.
Feature
[Feature1] EFFECTIVE AREA OF DEPOSITON AND VAPOR DEPOSITION SOURCE
The deposition of substrates up to Φ100mmis available.
The deposition of various sizes of substrates is available with special trays.
An electron gun for three sources and a resistance heating boat as a vapor deposition source are included as standard.
[Feature 2] OPERABILITY AND OPTIONS
The vacuum exhaust can be automatically activated by the electro manual via touch screen and malfunctions can be prevented by various interlocks.
Substrate rotation, Substrate heating/cooling and a chiller unit are available as an option.
[Feature 3] Expandability
STR2000 transfer unit having a frog-leg substrate feeding mechanism can be easily combined with ALD, Sputter and Annealing systems.
Such a combination enables substrates to be continuously processed without
exposure to atmosphere.
SEV2000Plus Specification
SEV2000Plus Outer dimension
